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Matters-Kammerer, Marion K., Jinesh, K. B., Rijks, Theo G. S. M., Roozeboom, Fred, Klootwijk, Johan H.. (). Characterization and modeling of atomic layer deposited high-density trench capacitors in silicon . : .

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Matters-Kammerer, Marion K., Jinesh, K. B., Rijks, Theo G. S. M., Roozeboom, Fred, Klootwijk, Johan H.. Characterization and modeling of atomic layer deposited high-density trench capacitors in silicon. : , . Text.

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Matters-Kammerer, Marion K., Jinesh, K. B., Rijks, Theo G. S. M., Roozeboom, Fred, Klootwijk, Johan H.. Characterization and modeling of atomic layer deposited high-density trench capacitors in silicon. : , . Text.

Gaya Turabian

Matters-Kammerer, Marion K., Jinesh, K. B., Rijks, Theo G. S. M., Roozeboom, Fred, Klootwijk, Johan H.. Characterization and modeling of atomic layer deposited high-density trench capacitors in silicon. : , . Print.