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Selvaraja, Shankar Kumar, Thourhout, Dries Van, Baets, Roel, Bogaerts, Wim, Dumon, Pieter, Jaenen, Patrick. (). Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography . : .

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Selvaraja, Shankar Kumar, Thourhout, Dries Van, Baets, Roel, Bogaerts, Wim, Dumon, Pieter, Jaenen, Patrick. Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography. : , . Text.

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Selvaraja, Shankar Kumar, Thourhout, Dries Van, Baets, Roel, Bogaerts, Wim, Dumon, Pieter, Jaenen, Patrick. Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography. : , . Text.

Gaya Turabian

Selvaraja, Shankar Kumar, Thourhout, Dries Van, Baets, Roel, Bogaerts, Wim, Dumon, Pieter, Jaenen, Patrick. Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography. : , . Print.