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Krueger, Dana C, MONTGOMERY, Douglas C, Mastrangelo, Christina M. (). Application of generalized linear models to predict semiconductor yield using defect metrology data . : .

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Krueger, Dana C, MONTGOMERY, Douglas C, Mastrangelo, Christina M. Application of generalized linear models to predict semiconductor yield using defect metrology data. : , . Text.

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Krueger, Dana C, MONTGOMERY, Douglas C, Mastrangelo, Christina M. Application of generalized linear models to predict semiconductor yield using defect metrology data. : , . Text.

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Krueger, Dana C, MONTGOMERY, Douglas C, Mastrangelo, Christina M. Application of generalized linear models to predict semiconductor yield using defect metrology data. : , . Print.