Gaya APA

Cai, Cathy, Padhi, Deenesh, Seamons, Martin, Bencher, Chris, Ngai, Chris, Kim, Bok Heon. (). Defect Gallery and Bump Defect Reduction in the Self-Aligned Double Patterning Module . : .

Gaya Chicago

Cai, Cathy, Padhi, Deenesh, Seamons, Martin, Bencher, Chris, Ngai, Chris, Kim, Bok Heon. Defect Gallery and Bump Defect Reduction in the Self-Aligned Double Patterning Module. : , . Text.

Gaya MLA

Cai, Cathy, Padhi, Deenesh, Seamons, Martin, Bencher, Chris, Ngai, Chris, Kim, Bok Heon. Defect Gallery and Bump Defect Reduction in the Self-Aligned Double Patterning Module. : , . Text.

Gaya Turabian

Cai, Cathy, Padhi, Deenesh, Seamons, Martin, Bencher, Chris, Ngai, Chris, Kim, Bok Heon. Defect Gallery and Bump Defect Reduction in the Self-Aligned Double Patterning Module. : , . Print.