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Zhou, Zaifa, Huang, Qingan, Zhu, Zhen, Li, Weihua. ().
An Efficient Simulation System for Inclined UV Lithography Processes of Thick SU-8 Photoresists .
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Zhou, Zaifa, Huang, Qingan, Zhu, Zhen, Li, Weihua.
An Efficient Simulation System for Inclined UV Lithography Processes of Thick SU-8 Photoresists.
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Gaya MLA
Zhou, Zaifa, Huang, Qingan, Zhu, Zhen, Li, Weihua.
An Efficient Simulation System for Inclined UV Lithography Processes of Thick SU-8 Photoresists.
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Text.
Gaya Turabian
Zhou, Zaifa, Huang, Qingan, Zhu, Zhen, Li, Weihua.
An Efficient Simulation System for Inclined UV Lithography Processes of Thick SU-8 Photoresists.
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Print.