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Tsiamis, Andreas, Smith, Stewart, McCallum, Martin, Hourd, Andrew, Stevenson, Tom, Walton, Anthony J.. (). Electrical Test Structures for the characterization of optical proximity correction . : .

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Tsiamis, Andreas, Smith, Stewart, McCallum, Martin, Hourd, Andrew, Stevenson, Tom, Walton, Anthony J.. Electrical Test Structures for the characterization of optical proximity correction. : , . Text.

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Tsiamis, Andreas, Smith, Stewart, McCallum, Martin, Hourd, Andrew, Stevenson, Tom, Walton, Anthony J.. Electrical Test Structures for the characterization of optical proximity correction. : , . Text.

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Tsiamis, Andreas, Smith, Stewart, McCallum, Martin, Hourd, Andrew, Stevenson, Tom, Walton, Anthony J.. Electrical Test Structures for the characterization of optical proximity correction. : , . Print.