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Dewen, Zhao, Yongyong, He, Tongqing, Wang, Xinchun, Liu. ().
Effect of kinematic Parameters and Their Coupling Relationships on Global Uniformity of Chemical-Mechanical Polishing .
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Gaya Chicago
Dewen, Zhao, Yongyong, He, Tongqing, Wang, Xinchun, Liu.
Effect of kinematic Parameters and Their Coupling Relationships on Global Uniformity of Chemical-Mechanical Polishing.
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,
.
Text.
Gaya MLA
Dewen, Zhao, Yongyong, He, Tongqing, Wang, Xinchun, Liu.
Effect of kinematic Parameters and Their Coupling Relationships on Global Uniformity of Chemical-Mechanical Polishing.
:
,
.
Text.
Gaya Turabian
Dewen, Zhao, Yongyong, He, Tongqing, Wang, Xinchun, Liu.
Effect of kinematic Parameters and Their Coupling Relationships on Global Uniformity of Chemical-Mechanical Polishing.
:
,
.
Print.