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Yan, Qiao, NaiQi, Wu, MengChu, Zhou. (). A petri net-based novel scheduling approach and its cycle time analysis for dual-arm cluster tools with wafer revisiting . : .

Gaya Chicago

Yan, Qiao, NaiQi, Wu, MengChu, Zhou. A petri net-based novel scheduling approach and its cycle time analysis for dual-arm cluster tools with wafer revisiting. : , . Text.

Gaya MLA

Yan, Qiao, NaiQi, Wu, MengChu, Zhou. A petri net-based novel scheduling approach and its cycle time analysis for dual-arm cluster tools with wafer revisiting. : , . Text.

Gaya Turabian

Yan, Qiao, NaiQi, Wu, MengChu, Zhou. A petri net-based novel scheduling approach and its cycle time analysis for dual-arm cluster tools with wafer revisiting. : , . Print.