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Zhao, Dewen, Wang, Tongqing, He, Yongyong, Lu, Xinchun. ().
Kinematic Optimization for Chemical Mechanical Polishing Based on Statistical Analysis of Particle Trajectories .
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Zhao, Dewen, Wang, Tongqing, He, Yongyong, Lu, Xinchun.
Kinematic Optimization for Chemical Mechanical Polishing Based on Statistical Analysis of Particle Trajectories.
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Zhao, Dewen, Wang, Tongqing, He, Yongyong, Lu, Xinchun.
Kinematic Optimization for Chemical Mechanical Polishing Based on Statistical Analysis of Particle Trajectories.
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Zhao, Dewen, Wang, Tongqing, He, Yongyong, Lu, Xinchun.
Kinematic Optimization for Chemical Mechanical Polishing Based on Statistical Analysis of Particle Trajectories.
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