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Fault Detection Using Human-Machine Co-Construct Intelligence in Semiconductor Manufacturing Processes

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Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING; Vol.28 No.3 August 2015

No. Panggil

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Penerbit

: .,

Deskripsi Fisik

p. 297-305

Bahasa

English

ISBN/ISSN

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Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

-

Edisi

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Subjek

SEMICONDUCTOR MANUFACTURING
CONDITIONAL VALUE-AT-RISK
PRINCIPAL COMPONENT ANALYSIS (PCA)
FAULT DETECTION (FD)
K-NEAREST NEIGHBOR (KNN)
HUMAN MACHINE CO-CONSTRUCT INTELLIGENCE

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Pernyataan Tanggungjawab

Manish Ranjit, Harshvardhan Gazula, Simon M. Hsiang, Yang Yu, Marcus Borhani, Sonny Spahr, Leyikun Taye, Chad Stephens, Bart Elliott

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