Gaya APA

Shen, Meihua, Wise, Rich, Singh, Harmeet, Pape, Eric, III, Bailey, Andrew D., Bowers, Jim, Hoang, John, Zhou, Yifeng, Zhou, Baosuo, Dasaka, Ravi K.. (). A New Etch Planarization Technology to Correct Non-Uniformity Post Chemical Mechanical Polishing . : .

Gaya Chicago

Shen, Meihua, Wise, Rich, Singh, Harmeet, Pape, Eric, III, Bailey, Andrew D., Bowers, Jim, Hoang, John, Zhou, Yifeng, Zhou, Baosuo, Dasaka, Ravi K.. A New Etch Planarization Technology to Correct Non-Uniformity Post Chemical Mechanical Polishing. : , . Text.

Gaya MLA

Shen, Meihua, Wise, Rich, Singh, Harmeet, Pape, Eric, III, Bailey, Andrew D., Bowers, Jim, Hoang, John, Zhou, Yifeng, Zhou, Baosuo, Dasaka, Ravi K.. A New Etch Planarization Technology to Correct Non-Uniformity Post Chemical Mechanical Polishing. : , . Text.

Gaya Turabian

Shen, Meihua, Wise, Rich, Singh, Harmeet, Pape, Eric, III, Bailey, Andrew D., Bowers, Jim, Hoang, John, Zhou, Yifeng, Zhou, Baosuo, Dasaka, Ravi K.. A New Etch Planarization Technology to Correct Non-Uniformity Post Chemical Mechanical Polishing. : , . Print.