Gaya APA

Riyanto, Edy, Rijanto, Estiko, Prawara, Budi. (). A Review of Atomic Layer Deposition for Nanoscale Devices . : .

Gaya Chicago

Riyanto, Edy, Rijanto, Estiko, Prawara, Budi. A Review of Atomic Layer Deposition for Nanoscale Devices. : , . Text.

Gaya MLA

Riyanto, Edy, Rijanto, Estiko, Prawara, Budi. A Review of Atomic Layer Deposition for Nanoscale Devices. : , . Text.

Gaya Turabian

Riyanto, Edy, Rijanto, Estiko, Prawara, Budi. A Review of Atomic Layer Deposition for Nanoscale Devices. : , . Print.