Gaya APA
Okamoto, Yuki, Mori, Isao, Lebrasseur, Eric, Marty, Frederic, Mita, Yoshio. ().
Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis .
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Gaya Chicago
Okamoto, Yuki, Mori, Isao, Lebrasseur, Eric, Marty, Frederic, Mita, Yoshio.
Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis.
:
,
.
Text.
Gaya MLA
Okamoto, Yuki, Mori, Isao, Lebrasseur, Eric, Marty, Frederic, Mita, Yoshio.
Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis.
:
,
.
Text.
Gaya Turabian
Okamoto, Yuki, Mori, Isao, Lebrasseur, Eric, Marty, Frederic, Mita, Yoshio.
Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis.
:
,
.
Print.