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Mid Infrared Integrated MZI Gas Sensor Using Suspended Silicon Waveguide

A novel mid-infrared (MIR) gas sensor is proposed. A sensitivity analysis of the suspended silicon waveguide for gaseous medium index change in the MIR range is also presented. The analysis shows that a suspended silicon waveguide achieves a high sensitivity with a minimal mode loss, which allows the design of a high performance Mach Zehnder interferometer (MZI) gas sensor using a suspended silicon waveguide structure. Two designs are proposed and optimized using the three-dimensional finite difference time domain solver. The first design is optimized for a wavelength interrogation scheme. This design, exhibits a high wavelength sensitivity S = 7028 nm/RIU and a high figure of merit (FOM) of 180 RIU -1 for both the wavelength and intensity interrogation methods with a sensing length L sens = 250 μm. The second proposed design is optimized for the intensity interrogation scheme and enhances the intensity interrogation FOM to reach 370RIU -1 . This design, based on suspended MZI, is less sensitive to wavelength variations. Our proposed sensors offer simple, low cost, and mass scale fabrication which makes them suitable for lab on a chip technology.

Ketersediaan

Informasi Detail

Judul Seri

JOURNAL OF LIGHTWAVE TECHNOLOGY; Vol.37 No.17, September 1, 2019

No. Panggil

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Penerbit

: .,

Deskripsi Fisik

p. 4394 - 4400

Bahasa

English

ISBN/ISSN

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Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

-

Edisi

-

Subjek

GAS SENSOR
INTENSITY INTERROGATION
MID INFRARED
SUSPENDED SILICON WAVEGUIDE

Info Detail Spesifik

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Pernyataan Tanggungjawab

Raghi S. El Shamy, Mohamed A. Swillam

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