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MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology platforms. Mechanical movement of wave-guiding structures at the micro- and nanoscale provides unique opportunities to further enhance functionality and to reduce power consumption in photonic integrated circuits. We here demonstrate integration of MEMS-enabled components in a simplified silicon photonics process based on IMEC's Standard iSiPP50G Silicon Photonics Platform and a custom release process.

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Informasi Detail

Judul Seri

IEEE JOURNAL OF QUANTUM ELECTRONICS; Vol.56 No.1 February 2020

No. Panggil

-

Penerbit

: .,

Deskripsi Fisik

p. 8400210

Bahasa

English

ISBN/ISSN

-

Klasifikasi

-

Tipe Isi

-

Tipe Media

-

Tipe Pembawa

-

Edisi

-

Subjek

INTEGRATED OPTICS
NANOPHOTONICS
PHOTONIC INTEGRATED CIRCUITS
SILICON PHOTONICS
MICROELECTROMECHANICAL SYSTEMS

Info Detail Spesifik

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Pernyataan Tanggungjawab

Niels Quack, Hamed Sattari, Alain Yuji Takabayashi, Yu Zhang, Peter Verheyen, Wim Bogaerts, Pierre Edinger, Carlos Errando-Herranz, Kristinn B. Gylfason

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