Gaya APA

Reddy, R. Ranga, Mita, Yoshio, Okamoto, Yuki. (). An On-Chip Micromachined Test Structure to Study the Tribological Behavior of Deep-RIE MEMS Sidewall Surfaces . : .

Gaya Chicago

Reddy, R. Ranga, Mita, Yoshio, Okamoto, Yuki. An On-Chip Micromachined Test Structure to Study the Tribological Behavior of Deep-RIE MEMS Sidewall Surfaces. : , . Text.

Gaya MLA

Reddy, R. Ranga, Mita, Yoshio, Okamoto, Yuki. An On-Chip Micromachined Test Structure to Study the Tribological Behavior of Deep-RIE MEMS Sidewall Surfaces. : , . Text.

Gaya Turabian

Reddy, R. Ranga, Mita, Yoshio, Okamoto, Yuki. An On-Chip Micromachined Test Structure to Study the Tribological Behavior of Deep-RIE MEMS Sidewall Surfaces. : , . Print.