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Extension of CD-TEM Towards 3D Elemental Mapping

We show how a CD-TEM (Critical Dimension-Transmission Electron Microscope) can be used to acquire EDS (Energy Dispersive X-ray Spectroscopy) tomograms, which allow chemical mapping in 3D for most elements in the sample. This is achieved by developing a recipe using ordinary commands also used in CD-TEM programming. In addition, we demonstrate how detector shadowing can be reduced significantly by using a special specimen holder and modified grids. The recipe, which runs autonomously and automatically, is verified using examples from modern FinFET and non-volatile memory devices.

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Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING; Vol.33 No.3 August 2020

No. Panggil

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Penerbit

: .,

Deskripsi Fisik

p. 346 - 351

Bahasa

English

ISBN/ISSN

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Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

-

Subjek

TEM
METROLOGY
FAILURE ANALYSIS
ELECTRON-TOMOGRAPHY

Info Detail Spesifik

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Pernyataan Tanggungjawab

Frieder H. Baumann, Brian Popielarski, Yinggang Lu, Travis Mitchell

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