Gaya APA
Choi, Jeong Eun, Park, Hyoeun, Lee, Yongho, Hong, Sang Jeen. ().
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma .
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Gaya Chicago
Choi, Jeong Eun, Park, Hyoeun, Lee, Yongho, Hong, Sang Jeen.
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma.
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Text.
Gaya MLA
Choi, Jeong Eun, Park, Hyoeun, Lee, Yongho, Hong, Sang Jeen.
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma.
:
,
.
Text.
Gaya Turabian
Choi, Jeong Eun, Park, Hyoeun, Lee, Yongho, Hong, Sang Jeen.
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma.
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.
Print.