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l₁ Trend Filtering-Based Change Point Detection for Pumping Line Balance of Deposition Equipment

One of the most significant manufacturing issues is how to monitor and diagnose the state of machines from various sensor data. Detecting machine state changes is very important because it can prevent machine breakdown or product quality deterioration. This work deals with a change point detection problem of semiconductor manufacturing equipment, especially for a deposition process, with real data. In a deposition machine, the pressures of two pumping lines, each of which absorbs a different gas (i.e., Zr and ozone), should be well-balanced so that the two gases are not mixed in a line. Otherwise, particles can be accumulated on the surface of wafers, which significantly affects the product quality. When one gas is pumped into another gas line, the balance of pumping lines is considered to be broken. We propose a ℓ1 trend filtering-based change point detection method to identify such a pumping balance break in the deposition machine. This method is suitable for data having increasing or decreasing trends, such as pressure and temperature, and can be applied for the real-time detection. The proposed method shows an adequate true detection rate while effectively reducing the number of false alarms compared to other methods. We further develop a prediction model for estimating the pressure in the machine to improve the performance of the change point detection algorithm.

Ketersediaan

Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING; Vol.35 No.1 February 2022

No. Panggil

-

Penerbit

: .,

Deskripsi Fisik

p. 137-145

Bahasa

English

ISBN/ISSN

-

Klasifikasi

NONE

Tipe Isi

-

Tipe Media

-

Tipe Pembawa

-

Edisi

-

Subjek

CHANGE POINT DETECTION
TREND FILTERING
PUMPING BALANCE
DEPOSITION EQUIPMENT
MULTI-STEP AHEAD PREDICTION MODEL

Info Detail Spesifik

DOI: 10.1109/TSM.2021.3135434

Pernyataan Tanggungjawab

Jeongsun Ahn, Duyeon Kim, Mingi Song, Jaehong Min, Jimin Hwang, Juhye Kwon, Hyun-Jung Kim

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