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Three Dimension Refractive Index Characterization for Photonic Waveguides

The nondestructive volumetric imaging technique to characterize a three-dimensional (3D) refractive index (RI) profile quantitatively is an essential tool for designing, fabricating, and evaluating photonic structures of various devices. Conventional 3D RI imaging methods usually depend on the sample rotation scheme, which finds it difficult to measure the RI distribution of sheet-like on-chip structures. In this study, we proposed an optical diffractive tomography (ODT) system by employing a galvanometric scanner to reconstruct on-chip waveguide RI profiles; the measured volumetric RI dimension was 63 × 63 × 32 μm 3 in a single measurement, and the RI sensitivity was up to 0.0015. The reliable reconstruction results proved that the proposed ODT system is a promising tool for quantitatively retrieving RI profiles of photonic devices

Ketersediaan

Informasi Detail

Judul Seri

JOURNAL OF LIGHTWAVE TECHNOLOGY; Vol.40 No.8 April 15 2022

No. Panggil

-

Penerbit

: .,

Deskripsi Fisik

p. 2474-2480

Bahasa

English

ISBN/ISSN

-

Klasifikasi

NONE

Tipe Isi

-

Tipe Media

-

Tipe Pembawa

-

Edisi

-

Subjek

OPTICAL WAVE GUIDES
REFRACTIVE INDEX
THREE DIMENSION IMAGING

Info Detail Spesifik

10.1109/JLT.2022.3141381

Pernyataan Tanggungjawab

Shuqi Mu, Yu Yang, Juhao Li, Dashan Dong, Ruijun Lan, Kebin Shi

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