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Shao, Hua, Li, Chen, Chen, Rui, Yan, Qi, Wei, Yayi, Dong, Lisong, Fan, Taian. (). High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition . : .

Gaya Chicago

Shao, Hua, Li, Chen, Chen, Rui, Yan, Qi, Wei, Yayi, Dong, Lisong, Fan, Taian. High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition. : , . Text.

Gaya MLA

Shao, Hua, Li, Chen, Chen, Rui, Yan, Qi, Wei, Yayi, Dong, Lisong, Fan, Taian. High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition. : , . Text.

Gaya Turabian

Shao, Hua, Li, Chen, Chen, Rui, Yan, Qi, Wei, Yayi, Dong, Lisong, Fan, Taian. High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition. : , . Print.