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Shao, Hua, Li, Chen, Chen, Rui, Yan, Qi, Wei, Yayi, Dong, Lisong, Fan, Taian. ().
High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition .
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Shao, Hua, Li, Chen, Chen, Rui, Yan, Qi, Wei, Yayi, Dong, Lisong, Fan, Taian.
High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition.
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Shao, Hua, Li, Chen, Chen, Rui, Yan, Qi, Wei, Yayi, Dong, Lisong, Fan, Taian.
High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition.
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Text.
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Shao, Hua, Li, Chen, Chen, Rui, Yan, Qi, Wei, Yayi, Dong, Lisong, Fan, Taian.
High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition.
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