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Sun, Peiji, She, Xuan, Yao, Junjie, Chen, Kan, Bi, Ran, Wang, Lei, Shu, Xiaowu. (). Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based On Michelson Interferometer Structure . : .

Gaya Chicago

Sun, Peiji, She, Xuan, Yao, Junjie, Chen, Kan, Bi, Ran, Wang, Lei, Shu, Xiaowu. Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based On Michelson Interferometer Structure. : , . Text.

Gaya MLA

Sun, Peiji, She, Xuan, Yao, Junjie, Chen, Kan, Bi, Ran, Wang, Lei, Shu, Xiaowu. Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based On Michelson Interferometer Structure. : , . Text.

Gaya Turabian

Sun, Peiji, She, Xuan, Yao, Junjie, Chen, Kan, Bi, Ran, Wang, Lei, Shu, Xiaowu. Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based On Michelson Interferometer Structure. : , . Print.