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Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based On Michelson Interferometer Structure

In this paper, we design a monolithic integrated micro-opto-electromechanical system(MOEMS) accelerometer based on the Michelson interferometer structure. The accelerometer realizes the on-chip integration of the mode spot converter, the sensing optical path, the phase modulator and the photonic crystal reflector, and it senses the external acceleration through a “three-beam” structure which is composed of a central support beam and two tiny beams. The push-pull structure eliminates the coupling crosstalk caused by paraxial acceleration. Accurate results are demonstrated as follows: an accelerometer mechanical sensitivity of 3.638 nm/g, with a resonance frequency of 1742.2 Hz and a linear measurement range of ± 500 g, corresponding to a foot print of the core part with 960 μm×600 μm. With its high precision, large measurement range, and small size, the proposed accelerometer may pave the way for the applications in civil, industrial and military fields.

Ketersediaan

Informasi Detail

Judul Seri

JOURNAL OF LIGHTWAVE TECHNOLOGY; Vol.40 No.13 July 1 2022

No. Panggil

-

Penerbit

: .,

Deskripsi Fisik

p. 4364-4372

Bahasa

English

ISBN/ISSN

-

Klasifikasi

NONE

Tipe Isi

-

Tipe Media

-

Tipe Pembawa

-

Edisi

-

Subjek

PHASE MODULATION
ACCELEROMETER
MICRO-OPTO-ELECTRO-MECHANICAL SYSTEM (MOEMS)
OPTICAL CHIP SENSOR

Info Detail Spesifik

DOI: 10.1109/JLT.2022.3163737

Pernyataan Tanggungjawab

Peiji Sun, Xuan She, Junjie Yao, Kan Chen, Ran Bi, Lei Wang, Xiaowu Shu

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