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Extension of CD-TEM Towards 3D Elemental Mapping
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Baumann, Frieder H.Popielarski, BrianLu, YinggangMitchell, Travis

We show how a CD-TEM (Critical Dimension-Transmission Electron Microscope) can be used to acquire EDS (Energy Dispersive X-ray Spectroscopy) tomograms, which allow chemical mapping in 3D for most e…


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