This article analysed and optimised horizontal Silicon insulator Silicon capacitor (H-SISCAP) phase shifter structures with insulator thickness t ox up to 40 nm. The phase shifter has an effective …
Kannan, Karthik - Dyaberi, Jagadeesh M. - Parsons, Benjamin - Pai, Vijay S. - Yih-Farn, Robin Chen - Jana, Rittwik Jana - Stern, Daniel - Varshavsky, Alexander