A novel metallic toroidal dipole (TD) metasurface driven by Friedrich-Wintgen bound states in the continuum (FW-BIC) is theoretically proposed for terahertz (THz) sensing. By tuning the middle gap …
Multi-cluster tools are widely used in semiconductor manufacturing. When the lot size of wafers tends to be quite small, a cyclic scheduling strategy is not suitable. However, the noncyclic schedul…