Recently, the transportation capability of the automated material handling system (AMHS) has emerged as a major barrier to the semiconductor fabrication facility (FAB), because it can limit the FAB…
Tronche, Herve - Baldi, Pascal - Doutre, Florent - Neradovsky, Maxim - Chezganov, Dimitry S. - Pashnina, Elena A. - Vlasov, Evgeniy O. - Lunghi, Tommaso - Shur, Vladimir Y. - De Micheli, Marc P.