Wafer Lot Assignment for Parallel-Producing Tools Based on Heuristic Clusteri…
Beyond the widely-studied scheduling of wafers within cluster tools, a novel and important perspective is raised in this paper to tackle an upper-level optimization problem in real-world production…
Nano-Displacement Measurement System Using a Modified Orbital Angular Momentu…
In this study, a nano-displacement measurement system is proposed and demonstrated both theoretically and experimentally, which was based on a modified Mach-Zehnder (M-Z) interferometer using two c…
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