Wafer Defect Pattern Labeling and Recognition Using Semi-Supervised Learning

Wafer map defect patterns provide valuable information for root cause analysis and yield learning. Previous studies show that supervised machine learning (ML) methods can achieve good defect patter…

Wafer Scratch Pattern Reconstruction for High Diagnosis Accuracy and Yield Op…

Spatial failure patterns in wafer defect maps are very useful for root cause analysis, which is essential for yield optimization in the manufacturing process. Especially, the scratch defect type is…

Machine Learning-Based Detection Method for Wafer Test Induced Defects

Wafer test is carried out after integrated circuits (IC) fabrication to screen out bad dies. In addition, the results can be used to identify problems in the fabrication process and improve manufac…

Hidden Wafer Scratch Defects Projection for Diagnosis and Quality Enhancement

Wafer map defect pattern recognition provides useful clues to yield learning. However, most wafer maps have no special spatial patterns and are full of noises, which make pattern recognition diffic…

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