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Simultaneous Phase Detection of Multi-Wavelength Interferometry Based on Freq…
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Liu, QiangZhang, ShihuaYan, LipingLou, YingtianSun, Zhengrong

Simultaneous phases detection in multi-wavelength interferometry (MWLI) is essential for high-accuracy dynamic absolute distance measurement in high-end equipment manufacturing. To address this pro…


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